Ultratech, Inc. (Nasdaq: UTEK) has received a follow-on order from one of the largest foundries in Asia for its LSA101 laser spike anneal system, the company said.
This win extends the company´s leadership position in Asia and builds on the existing installed base of Ultratech´s LSA systems currently utilized at multiple sites by this foundry customer. The LSA101 system, which will be used for 28-nm production is expected to ship in the first quarter of 2016.
Built on the customizable Unity Platformâ„¢, the LSA scanning systems have fundamental advantages in uniformity and low-stress processing. The systems´ short dwell time capability, along with excellent process control, delivers superior within-die uniformity and layout-independent process results allowing customers to achieve improved device performance, lower leakage, and improved yield.
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