Axcelis ships first 'Purion VXE'

Semiconductor solutions supplier Axcelis Technologies, Inc. (Nasdaq: ACLS) has received its first order for the Purion VXEâ„¢, a new extended energy range high energy implanter, the company said.

The new system delivers the highest energy range in the Purion platform. The customer plans to use the 300mm Purion VXE to support R&D for image sensors in the mobile and IoT markets. The system is scheduled to ship in the fourth quarter.

Axcelis, headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis develops enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process.